China's Domestically Produced DUV Lithography Machines Have Started Mass Production, ChangXin Memory May Be Among First Customers
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China's Domestically Produced DUV Lithography Machines Have Started Mass Production, ChangXin Memory May Be Among First Customers
According to The Information, citing sources familiar with the matter, a state-backed enterprise in Shanghai has begun mass production of independently developed DUV (deep ultraviolet) lithography equipment, and plans to produce about 5 units in 2026, expanding to about 20 units in 2027. Sources say the equipment is intended for delivery to domestic chip manufacturers such as SMIC, Hua Hong Semiconductor, and CXMT, with CXMT potentially becoming one of the first customers.
Navigating Web3 tides with focused insightsTechFlow reports, on July 27, according to sources cited by The Information, a state-backed enterprise in Shanghai has begun mass production of self-developed DUV (deep ultraviolet) lithography equipment, and plans to produce about 5 units in 2026, expanding to about 20 units in 2027.
Sources said that the equipment is intended for delivery to domestic chip manufacturers such as SMIC, Hua Hong Semiconductor, and CXMT, with CXMT potentially becoming one of the first customers.
This move is seen as a milestone in the localization of China's semiconductor manufacturing equipment, but there is still a significant gap in overall capacity compared to ASML.
